Application
In Glow Discharge Optical Emission Spectroscopy atoms are sputtered from the sample surface in an argon (Ar) glow discharge. The sputtered atoms recombine with electrons in the plasma discharge. The light emitted from this recombination is analyzed using an optical emission spectrometer in order to obtain a depth profile of chemical composition (down to ppm sensitivity).
Technical data:
depth profiling of materials ranging from thin films (with a depth of a few nanometers) to bulks (with a depth of tens of micrometers) at high depth resolution and in a short time.
GD-OES can evaluate various materials, including metals, insulation films (e.g., glass) and organic films.
Before you begin
- Contact equipment responsible: sergey.khromov@ntnu.no
- Contact room responsible for access: sergey.khromov@ntnu.no
- Training: required